Enhanced Photovoltaic Performance of Micro-nano Structured Silicon Solar Cells by Atomic Layer Deposition

In this paper, we deposit Al2O3 as a passivation layer and then aluminum doped ZnO (AZO) film as the transparent electrode on silicon solar cells by atomic layer depositon. We compare?the photoelectric properties of different silicon solar cells?(planar, pyramids, and black silicon) by measuring their reflection spectra, I-V curves, and external quantum efficiencies. We deposit 10 cycles of?Al2O3 and 180 nm AZO film on silicon solar cells, and greatly improve their performance in comparison with the case without the passivation layer and AZO film.