RESERCH ON OPTICAL PROPERTIES OF RARE EARTH Y-Al CODOPED ZnO TRANSPARENT FILMS

Transparent Al and Y codoped Zinc oxide(Y-AZO) thin films were deposited by a sol-gel dip-coating method. The structure and properties of these films were characterized by X-ray diffraction, scanning electron microscopy/energy dispersive X-ray spectrometry,and UV-Vis spectroscopy.The results proved:a hexagonal wurtzite structure was retained by Y-AZO films, while the doping ratio of Al was greater than or equal to the amount of Y and the annealing temperature was 500℃, The pure transparent thin film was available. The transmitttrance was above 87% in the range of 400-700nm visible region.