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JI Lina, DENG Jianxun, WANG Juan, HUANG Zuohua. A Study of the Optical Constants and Euler Angle of Anisotropic Thin Film with the Single-wavelength Ellipsometer[J]. Journal of South China Normal University (Natural Science Edition), 2019, 51(4): 14-20. DOI: 10.6054/j.jscnun.2019058
Citation: JI Lina, DENG Jianxun, WANG Juan, HUANG Zuohua. A Study of the Optical Constants and Euler Angle of Anisotropic Thin Film with the Single-wavelength Ellipsometer[J]. Journal of South China Normal University (Natural Science Edition), 2019, 51(4): 14-20. DOI: 10.6054/j.jscnun.2019058

A Study of the Optical Constants and Euler Angle of Anisotropic Thin Film with the Single-wavelength Ellipsometer

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  • Received Date: January 06, 2019
  • Available Online: March 21, 2021
  • Based on the principle of ellipsometry and the 4×4 matrix method, a way of measuring the parameters of anisotropic films whose optical axis is parallel to the surface with the single-wavelength ellipsometer is proposed, the parameters including birefringence, thickness and Euler angle. Two sets of ellipsometric parameters can be obtained by rotating the sample at 90°, and four film parameters of the anisotropic film can be obtained with the inversion algorithm to invert two sets of ellipsometric parameters.The effects of incident angle, film thickness, Euler angle and its rotation error on measurement accuracy are discussed with numerical simulation. The ellipsometric parameters of the polyimide film whose optical axis parallels its surface are measured and inverted. The results show that the algorithm has good stability and high precision and the ordinary refractive index, extraordinary refractive index, thickness and Euler angle are 0.000 1, 0.000 1, 0.1 nm and 0.03° respectively. The maximum measurement errors of ordinary refractive index, extraordinary refractive index and thickness are 0.001 2, 0.004 4 and 4.57 nm respectively. This method has good measurement stability, self-consistency and reliability as well as the advantages of simple measurement process and low requirement for instruments. This method extends the measurement range of single-wavelength ellipsometer and the way of measuring anisotropic film, so it has practical significance.
  • [1]
    KAMINSKA K, ROBBIE K. Birefringent omnidirectional reflector[J]. Applied Optics, 2004, 43(7):1570-1576. doi: 10.1364/AO.43.001570
    [2]
    詹媛媛, 俞燕蕾, 李楠, 等.液晶聚合物分子排列调控的研究进展[J].华南师范大学学报(自然科学版), 2017, 49(1):1-8. http://d.old.wanfangdata.com.cn/Periodical/hnsfdx201701001

    ZHAN Y, YU Y, LI N, et al. Research progress on modulation of molecular alignment of liquid crystalline polymers[J]. Journal of South China Normal University (Natural Science Edition), 2017, 49(1):1-8. http://d.old.wanfangdata.com.cn/Periodical/hnsfdx201701001
    [3]
    WANG H. Analysis of anisotropic thin film parameters from prism coupler measurements[J]. Journal of Modern Optics, 1995, 42(11):2173-2181. doi: 10.1080/09500349514551891
    [4]
    JEN Y J, CHIANG C L. Enhanced polarization conversion for an anisotropic thin film[J]. Optics Communications, 2006, 265(2):446-453. doi: 10.1016/j.optcom.2006.03.060
    [5]
    FUJIWARA H. Spectroscopic ellipsometry:principles and applications[M]. Tokyo:Maruzen Co. Ltd, 2007:209-303.
    [6]
    穆全全, 刘永军, 胡立发, 等.光谱型椭偏仪对各向异性液晶层的测量[J].物理学报, 2006, 55(3):1055-1060. doi: 10.3321/j.issn:1000-3290.2006.03.010

    MU Q Q, LIU Y J, HU L F, et al. Determination of anisotropic liquid crystal layer parameters by spectroscopic ellipsometer[J]. Acta Physica Sinica, 2006, 55(3):1055-1060. doi: 10.3321/j.issn:1000-3290.2006.03.010
    [7]
    TOKAS R B, JENA S, HAQUE S M, et al. Spectroscopic ellipsometry investigations of optical anisotropy in obliquely deposited hafnia thin films[C]//Dae Solid State Phate Physics Symposium.[S.l]: AIP Conference Proceedings, 2016, 060007/1-3.
    [8]
    ISIK M, GASANLY N M. Optical parameters of anisotro-pic chain-structured Tl2InGaTe4 crystals by spectroscopic ellipsometry[J]. Optik, 2016, 127(22):10637-10642. doi: 10.1016/j.ijleo.2016.08.097
    [9]
    TOMIYAMA T, YAMAZAKI H. Optical anisotropy studies of silver nanowire/polymer composite films with Mueller matrix ellipsometry[J]. Applied Surface Science, 2017, 421:831-836. doi: 10.1016/j.apsusc.2017.01.152
    [10]
    WESTPHAL P, KALTENBACH J M, WICKER K. Corneal birefringence measured by spectrally resolved Mueller matrix ellipsometry and implications for non-invasive glucose monitoring[J]. Biomedical Optics Express, 2016, 7(4):1160-1174. doi: 10.1364/BOE.7.001160
    [11]
    POSTAVA K, SYKORA R, LEGUT D, et al. Determination of anisotropic crystal optical properties using Mueller matrix spectroscopic ellipsometry[J]. Procedia Materials Science, 2016, 12:118-123. doi: 10.1016/j.mspro.2016.03.021
    [12]
    PHAN Q H, LO Y L. Characterization of optical/physical properties of anisotropic thin films with rough surfaces by Stokes-Mueller ellipsometry[J]. Optical Materials Express, 2016, 6(6):1774-1789. doi: 10.1364/OME.6.001774
    [13]
    KAMPEN T U, PARAIAN A M, ROSSOW U, et al. Optical anisotropy of organic layers deposited on semiconductor surfaces[J]. Physica Status Solidi A, 2001, 188(4):1307-1317. doi: 10.1002/1521-396X(200112)188:4<1307::AID-PSSA1307>3.0.CO;2-8
    [14]
    LO Y L, HSIEH W H, CHUNG Y F, et al. An approach for measuring the ellipsometric parameters of isotropic and anisotropic thin films using the Stokes parameter method[J]. Journal of Lightwave Technology, 2012, 30(14):2299-2306. doi: 10.1109/JLT.2012.2196977
    [15]
    LO Y L, CHUNG Y F, LIN H H. Polarization scanning ellipsometry method for measuring effective ellipsometric parameters of isotropic and anisotropic thin films[J]. Journal of Lightwave Technology, 2013, 31(14), 2361-2369. doi: 10.1109/JLT.2013.2265716
    [16]
    SCHUBERT M. Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems[J]. Physical Review B, 1996, 53(8):4265-4274. doi: 10.1103/PhysRevB.53.4265
    [17]
    陈宝林.最优化理论与算法[M].北京:清华大学出版社, 2005:334-432.
    [18]
    FAN L, HUANG Z. Simulated annealing-simplex hybrid algorithm for ellipsometric data inversion of multilayer films[J]. Review of Scientific Instruments, 2013, 84(6):063103/1-4. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=30d5a6682815a54895fe0af7a8d10de0
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