多晶硅材料消解方法的探究

Digestion Method of Polysilicon

摘要: 探究了多晶硅样品的酸溶消解法.优化了氢氟酸、硝酸建立的酸解体系，并针对多晶硅粉末状样品给出了最优消解V（H2O）〖KG-1.5mm〗∶〖KG-1mm〗V（HF）〖KG-1.5mm〗∶〖KG-1mm〗V（HNO3）约为20〖KG-0.7mm〗∶〖KG-1mm〗28〖KG-1mm〗∶〖KG-1mm〗10.比较了室温密闭消解、超声辅助消解、水浴加热辅助消解和微波消解对消解效果的影响，结果表明，对于多晶硅粉末样品室温密闭消解1 h为最简便有效的消解方式.

Abstract: 〖JP2〗An acid-soluble digestion method of polysilicon sample was explored. The acid-soluble systems of hydrofluoric acid and nitric acid were confirmed. The optimized acid digestion ratio of V(H2O)〖KG-1.8mm〗∶〖KG-1mm〗V(HF)〖KG-1.8mm〗∶〖KG-1mm〗V(HNO3) was 20〖KG-1mm〗∶〖KG-1mm〗28〖KG-1mm〗∶〖KG-1mm〗10 for polysilicon powder samples. Comparing the digestion effect of closed digestion at room temperature, ultrasound-assisted digestion, water bath heating-assisted digestion and microwave digestion, it was found that the closed 〖JP3〗digestion at room temperature for one hour is the most convenient and effective way to digest polysilicon powder sample. 〖JP〗