Abstract: Electrowetting display is a kind of device that use fluororesin layer (e.g. AF1600) as the hydrophobic insulating layer. It works with changing applied voltages to change the surface wettability of liquid. In order to get better adhesive properties for photoresist layer and the fluororesin layer, ion itching should be done to increase the wettability.　Electro-wetting properties need to be restored by recovering fluororesin hydrophobic wetting properties after photolithography. A usual method is high temperature reflow. This method would melt leveling thefluorine resin surface, but high temperature would also cause　defects like yellowing photoresist material, pixel grid deformation etc. In this paper , instead of high temperature reflow method, vapor redissolve method was suggested to recover hydrophobicity, using a fluorocarbon solvent(HFE7100) steam to dissolve fluororesin layer surface roughened sol state. After heating, the solvent was evaporated to restore the hydrophobic nature of its surface. Focus on the dissolving time, drying temperature and drying time, deep research was done in this paper. Comparion on physical effects and photoelectric effects to electrowetting display devices are made between these two methods.