稀土钇-铝共掺杂氧化锌透明薄膜光学性能研究

RESERCH ON OPTICAL PROPERTIES OF RARE EARTH Y-Al CODOPED ZnO TRANSPARENT FILMS

  • 摘要: 采用溶胶-凝胶浸渍提拉法制备出纳米钇-铝共掺杂氧化锌(Y-AZO)透明薄膜,利用XRD、EDX、SEM、UV-Vis测试对薄膜进行了表征.结果表明:Y-AZO晶粒为六角纤锌矿结构,当Al的掺杂量高于或等于Y的掺杂量、退火温度为500℃时可以得到不含杂质的均匀透明的薄膜,且薄膜在400~780 nm 可见光范围内平均透过率在87%以上.

     

    Abstract: Transparent Al and Y codoped Zinc oxide(Y-AZO) thin films were deposited by a sol-gel dip-coating method. The structure and properties of these films were characterized by X-ray diffraction, scanning electron microscopy/energy dispersive X-ray spectrometry,and UV-Vis spectroscopy.The results proved:a hexagonal wurtzite structure was retained by Y-AZO films, while the doping ratio of Al was greater than or equal to the amount of Y and the annealing temperature was 500℃, The pure transparent thin film was available. The transmitttrance was above 87% in the range of 400-700nm visible region.

     

/

返回文章
返回