透射式透明薄膜厚度的在线测量

陈方涵; 赵光宇; 蒋仕龙

doi:10.6054/j.jscnun.2019039

透射式透明薄膜厚度的在线测量

1.
(1.深港产学研基地运动控制技术实验室,深圳 518057;
2.
2.华南师范大学华南先进光电子研究院,光及电磁波研究中心,广州 510006）

基金项目:

国家自然科学基金;深圳市未来产业专项资金

详细信息

通讯作者:
蒋仕龙

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出版历程
- 收稿日期: 2018-03-06
- 修回日期: 2018-03-21
- 刊出日期: 2019-06-24

Transmissive Online Thickness Measurement of Transparent Thin Film

1.
(1. Laboratory of Motion Control Technology,PKU-HKUST Shenzhen-Hong Kong Institution,Shenzhen 518057,China;
2.
2. Center for Optics and Electromagnetic Research,South China Academy of Advanced Optoelectronics,South China Normal University,Guangzhou 510006,China)

摘要

摘要: 为满足工业半透明薄膜厚度在线检测的实际需求，论文提出了一种基于透射式光密度计量法的全场在线测量方法.该方法利用相机采集的放置薄膜前后的图像灰度值作为入射/出射能量计算其光密度值，再通过比尔-朗伯定律建立光密度值与厚度之间的关系.为减小测量误差，采用标准密度值标定板对系统进行标定，对计算的理论光密度值进行偏移校正.该系统结构简单，单次测量面积可达100 mm * 75 mm；以四氟薄膜为例进行验证，其测量的平均误差为5.7%，标准偏差为6.66%，为薄膜厚度全场在线检测提供了新的可行性.
- 透明薄膜 /
- 透射光密度 /
- 厚度测量 /
- 比尔-朗伯定律
Abstract: In order to satisfy the industrial requirements of online thickness inspection for semi-transparent thin-film, a method based on optical transmission density was presented. The optical density could be calculated by output and input radiation captured by camera, which were grayscale value received with and without thin-film, respectively. Then relationship between density value and thickness was constructed by Beer-Lambert law. To reduce measurement error, it was necessary to calibrate the density by standard calibration sheet, and correct the density drift of calculated value. The system exploited thickness measurement had a simple configuration, and 100 mm * 75 mm range was measured each time. PEFT film was adopted to demonstrate the feasibility of the method. The analysis results showed that the average error of the densitometer was 5.7% with a standard deviation of 6.66%. It can be used to full-field online thickness measurement of thin film.
- thin film /
- optical transmission density /
- thickness measurement /
- Beer-Lambert law