Abstract: The ordering degree of nanostructures is the key to determining the uniformity of surface-enhanced Raman scattering (SERS). The fabrication of large-area ordered noble metal nanostructures with an ultrahigh density remains a challenge. A template-assisted method was reported for the fabrication of large-area ultrahigh-density ordered arrays of Ag nanosphere (NS) with tunable nanostructures,and the effects of annealing temperature,pressure and thickness of Ag films on morphology and structure of Ag nanospheres were investigated. The as-fabricated Ag nanosphere arrays can be further applied to the SERS substrate.