Research of Electron Cyclotron Resonance Plasma Langmuir Probe Diagnostic Techniques
-
摘要: 采用Langmuir静电单探针和双探针诊断技术对微波电子回旋共振（ECR）装置产生的低温低气压氮气等离子体进行诊断.测量结果表明由饱和离子电流计算得到的电子密度约为21010/cm3,而由饱和电子电流计算得到的电子密度仅在11010/cm3左右;由单探针测量的轴向电子温度最高可达7eV,而双探针的测量值最大仅为4.5eV.引入Langmuir受限轨道理论对这些差异现象进行分析,提出电流分离的思想,将电子电流与离子电流分离,证明了受限轨道理论在ECR等离子体中的适用性.解决了使用单探针测量电子温度时直线部分不明显的问题.
-
关键词:
- 电子温度
Abstract: In this paper, we use the Langmuir single probe and double probe to diagnose a low-temperature low-pressure isotropic plasma induced by microwave electron cyclotron resonance (ECR) device. The results show that the plasma density which calculated by ion saturation current is about 21010/cm3 and by electron saturation current is just about 11010/cm3 . The electron temperature which measured by Langmuir single probe is up to 7eV and measured by double probe is just up to 4.5eV in the axial. Langmuir orbital motion limited theory is introduced successfully to achieve separation of electron current and ion current. This paper solves the problem that the linear part of the single electron temperature probe reading is not obvious.-
Keywords:
- Electron temperature
-
-
[1].参考文献
[2] 叶超, 宁兆元, 等.低气压低温等离子体诊断原理与技术[M]. 北京:科学出版社, 2010. 72—76
[3] S.B. Singh, N. Chand, D.S. Patil. Langmuir probe diagnostics of microwave electron cyclotron resonance (ECR) plasma[J]. Vacuum, 2009, 83:372-377
[4] R.Kar, S.A. Barve, S.B. Singh, D.N. Barve, N. Chand, D.S. Patil. Diagnostics of microwave ECR generated plasma: Effect of contaminated reference electrode [J]. Vacuum, 2010, 85:151-155
[5] 赵化侨.等离子体化学与工艺[M]. 合肥:中国科学技术大学出版社, 1993. 27—32
[6] 沈武林, 马志斌, 谭必松.ECR等离子体的磁电加热研究[J].物理学报, 2011. 10 105204
[7]Shen W L, Ma Z B, Tan B S Magnetoelectric heating in the ECR plasma[J].Acta Phys. Sin, 2011. 10 105204
[8] 符斯列, 陈俊芳, 吴先球, 赵文峰, 樊双莉, 马涛.等离子体参数诊断及其特性研究[J].华南师范大学学报(自然科学版)04. 02：77-81
[9]FU Si - lie, CHEN J un - fang, WU Xian - qiu, ZHAO Wen - feng, FAN Shuang - li, MA Tao.Study on Diagnosis and Prepreties Plasma Parameters [J]. Journal of South China Normal University (natural science edition), 04. 02：77-81
[10]. 力伯曼 M A, 里登伯格 A J 著 (王广阳译) 2007 等离子体放电原理与材料处理[M](北京:科学出版社) 144页
[11].Lieberman M A, Lichtenberg A J(translated by Pu Y K) 2007 Principles Plasma Discharges and Materials Processing[M] (Bejing:Science Press)p144 (in Chinese)
[12]FU Silie, CHEN Junfang, WU Xianqiu.Spatial Distribution of ECR Plasma Density in ECR-PECVD Reaction Chamber[J].Plasma Science & Technology, 2006, 08(03):300-302
[13]Li Wei, Chen Jun-Fang, Wang Teng.Prediction of the plasma distribution using an artificial neural network[J].Chinese Physics B, 2009, 18(06):2441-2444[1].参考文献
[2] 叶超, 宁兆元, 等.低气压低温等离子体诊断原理与技术[M]. 北京:科学出版社, 2010. 72—76
[3] S.B. Singh, N. Chand, D.S. Patil. Langmuir probe diagnostics of microwave electron cyclotron resonance (ECR) plasma[J]. Vacuum, 2009, 83:372-377
[4] R.Kar, S.A. Barve, S.B. Singh, D.N. Barve, N. Chand, D.S. Patil. Diagnostics of microwave ECR generated plasma: Effect of contaminated reference electrode [J]. Vacuum, 2010, 85:151-155
[5] 赵化侨.等离子体化学与工艺[M]. 合肥:中国科学技术大学出版社, 1993. 27—32
[6] 沈武林, 马志斌, 谭必松.ECR等离子体的磁电加热研究[J].物理学报, 2011. 10 105204
[7]Shen W L, Ma Z B, Tan B S Magnetoelectric heating in the ECR plasma[J].Acta Phys. Sin, 2011. 10 105204
[8] 符斯列, 陈俊芳, 吴先球, 赵文峰, 樊双莉, 马涛.等离子体参数诊断及其特性研究[J].华南师范大学学报(自然科学版)04. 02：77-81
[9]FU Si - lie, CHEN J un - fang, WU Xian - qiu, ZHAO Wen - feng, FAN Shuang - li, MA Tao.Study on Diagnosis and Prepreties Plasma Parameters [J]. Journal of South China Normal University (natural science edition), 04. 02：77-81
[10]. 力伯曼 M A, 里登伯格 A J 著 (王广阳译) 2007 等离子体放电原理与材料处理[M](北京:科学出版社) 144页
[11].Lieberman M A, Lichtenberg A J(translated by Pu Y K) 2007 Principles Plasma Discharges and Materials Processing[M] (Bejing:Science Press)p144 (in Chinese)
[12]FU Silie, CHEN Junfang, WU Xianqiu.Spatial Distribution of ECR Plasma Density in ECR-PECVD Reaction Chamber[J].Plasma Science & Technology, 2006, 08(03):300-302
[13]Li Wei, Chen Jun-Fang, Wang Teng.Prediction of the plasma distribution using an artificial neural network[J].Chinese Physics B, 2009, 18(06):2441-2444 -
期刊类型引用(2)
1. 熊文文, 陈俊芳, 王燕, 王勇. 工作气压对氩射频电感耦合等离子体模式转换的影响. 华南师范大学学报(自然科学版). 2019(01): 16-21 . 
百度学术
2. 张金禾, 周严东, 刘汝兵, 林麒. 低压汞灯等离子体电子密度分布光谱诊断研究. 机电技术. 2015(06): 88-91 . 百度学术
其他类型引用(1)
计量
- 文章访问数: 1329
- HTML全文浏览量: 90
- PDF下载量: 231
- 被引次数: 3
下载:
